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Microelectronics Engineering

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Microelectronics Engineering

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Research Frontiers in Advanced CMOS Process Technology Nodes

Development and optimization of sub-3nm CMOS fabrication processes with enhanced performance, power efficiency, and yield.

Quantum Tunneling Mitigation in Sub-3nm Gate Stacks
Extreme Ultraviolet Lithography Defect Engineering
Thermal Transport Collapse at Advanced Node Densities
Negative Capacitance Phenomena in Ferroelectric Transistors
3D Gate-All-Around Device Reliability and Variability
Power Delivery Networks in Ultra-Dense Interconnect Stacks
Back-End-Of-Line Material Innovation for Sub-20nm Copper
Statistical Variability in Atomic-Scale Doping Distributions
Metrology and In-Situ Process Control at Angstrom Resolution
Multi-Channel Gate Oxide Breakdown Physics in Scaled Transistors

All Microelectronics Engineering PhD categories